Eddy Simoen: Metal Impurities in Silicon- and Germanium-Based Technologies
Metal Impurities in Silicon- and Germanium-Based Technologies
Buch
- Origin, Characterization, Control, and Device Impact
- Springer International Publishing, 08/2018
- Einband: Gebunden, HC runder Rücken kaschiert
- Sprache: Englisch
- ISBN-13: 9783319939247
- Bestellnummer: 8290855
- Umfang: 472 Seiten
- Nummer der Auflage: 18001
- Auflage: 1st ed. 2018
- Gewicht: 868 g
- Maße: 244 x 164 mm
- Stärke: 34 mm
- Erscheinungstermin: 22.8.2018
- Serie: Springer Series in Materials Science - Band 270
Achtung: Artikel ist nicht in deutscher Sprache!
Weitere Ausgaben von Metal Impurities in Silicon- and Germanium-Based Technologies
Klappentext
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and / or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices performance. Several control and possible gettering approaches are addressed.The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e. g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.